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THIEME Srceen-printing line for the cost-efficient printing of silicon wafers |
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| Control | ||||||||||||||||||||||||||||||||||||||
| Loading System/ Wafer Handling | ||||||||||||||||||||||||||||||||||||||
| Printing Unit | ||||||||||||||||||||||||||||||||||||||
| Printing Table/ Print Nest | ||||||||||||||||||||||||||||||||||||||
| Control Systems | ||||||||||||||||||||||||||||||||||||||
| Paste Feed | ||||||||||||||||||||||||||||||||||||||
The fully automatic THIEME screen-printing system for the precision printing of silicon wafers is conceived as a rotary cycle system with specially developed printing nests. Equipped with integrated material transport systems, inline quality control systems and effective paste curing, THIEME ensures a cost-efficient process.
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The system concept ensures a stress-free printing on the wafers and a precice material transport |
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USA/Canada : Bernd Klammer, Phone +1-630-5 13-16 66 Great Britain: Andrew Kippax, Phone +44 (0) 1484 51 13 33 For all other countries: Klaus Messmer, Phone +49 (0) 7641 583-524 |
| Control Every print station has a central operating unit from where the line components can be controlled: Loading system Print station Control system Dryer |
| Loading System/Wafer Handling The loading system can be designed either as an inline solution or stack box pick-up, depending on the customer requirements. The integrated breakage control vision system in the loading unit ensures that two undamaged wafers at a time are deposited on the print nest. The handling system with camera positioning system ensures the precise transfer of the wafers to the printing table. |
| Printing Unit Performance features of the printing unit: absolute reproducibility of the print parameters self-adjusting squeegee system large process window for the respective print parameters low mechanical load on the wafers Simple operation and short set-up times due to: screen change without removing the squeegee and floodbar automatic screen positioning with a camera vision system squeegee and floodbar quick-action clamping systems self-adjusting pressure for the printbeam operator friendly access to the underside of the screen due to cleaning position of the printing unit |
| Printing Table/Print Nest The special designed print nest is equipped with a paper support which ensures a consistent clean printing table surface. After a screen changeover, the roll-to-roll paper support can be used as a test print substrate to avoid the usage of wafers for set-up. The paper feed/transport ensures a fluent and streamlined wafer transport to the following stations. |
| Control Systems The wafers are inspected for breakages and print quality through backlightning the print nest and vision inspection. Faulty parts are recognized immediately and automatically removed from the production line. The print nest is also checked for contamination and then released for reloading. In the case of contamination, a clean table surface is automatically provided with the aid of the paper feed through the integrated roll-to-roll device. The whole control process has no influence on the cycle time of the print station. |
| Automatic Paste Feed Through the use of an automatic paste dispensing system, the paste is maintained at a constant level in the screen and the overall line uptime is further enhanced. The feed systems are adapted for an optimum process sequence depending on the customers print paste. |
| Continuous Dryers Continuous dryers utilizing hot air and IR radiation carry out rapid and thorough drying of the pastes. As no handling is necessary for drying, there is no risk of breakage of the wafers. |